Introduction to Focused Ion Beams: Instrumentation, Theory, Techniques and Practice (Paperback)

Introduction to Focused Ion Beams: Instrumentation, Theory, Techniques and Practice By Lucille A. Giannuzzi (Editor), North Carolina State University Center f (Editor) Cover Image
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Description


Introduction to Focused Ion Beams is geared towards techniques and applications. The first portion of this book introduces the basics of FIB instrumentation, milling, and deposition capabilities. The chapter dedicated to ion-solid interactions is presented so that the FIB user can understand which parameters will influence FIB milling behavior. The remainder of the book focuses on how to prepare and analyze samples using FIB and related tools, and presents specific applications and techniques of the uses of FIB milling, deposition, and dual platform techniques. This is the only text that discusses and presents the theory directly related to applications and the only one that discusses the vast applications and techniques used in FIBs and Dual platform instruments



Product Details
ISBN: 9781441935748
ISBN-10: 1441935746
Publisher: Springer
Publication Date: October 29th, 2010
Pages: 357
Language: English