Metal Impurities in Silicon-Device Fabrication (Paperback)

Metal Impurities in Silicon-Device Fabrication By Klaus Graff Cover Image
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Description


This up-to-date monograph provides a thorough review of the relevant data and properties of the transition-metal impurities generated during silicon-sample and device fabrication. The different mechanisms responsible for contamination are discussed, and a survey is given of their impact on device performance. The specific properties of the main and rare impurities in silicon are examined, as well as the detection methods and requirements in modern technology. This new edition includes important recent data and many new tables.


Product Details
ISBN: 9783642629655
ISBN-10: 3642629652
Publisher: Springer
Publication Date: October 21st, 2012
Pages: 270
Language: English
Series: Springer Series in Materials Science